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Home/Products/Pleated Cartridge Filters/Semiconductor-grade PTFE Membrane Filter Cartridge

Pleated Cartridge Filters

Semiconductor-grade PTFE Membrane Filter Cartridge

Product ID: hydrophobic-ptfe-nano-filter|PTFE Membrane

A PTFE membrane filter cartridge designed for corrosive semiconductor wet processes and high-purity chemical filtration. A proprietary fluoropolymer membrane micro-structure control platform builds a highly connected, uniform and stable nano-pore network, helping customers achieve higher retention, lower extractables and faster clean-up to production ready across SPM, SC1, SC2, TMAH, 29% NH4OH, 35% HCl, 70% HNO3, phosphoric acid, PAN, mixed-acid etchants and NBA. 10/20/30/50nm and 0.1µm ratings, 222 Flat Cartridge, samples ready.

Proprietary fluoropolymer membrane micro-structure platform with a highly connected, uniform nano-pore network
PTFE media withstands strong acids, strong bases and highly corrosive process chemicals
Rare ultra-thin PTFE membrane micro-structure (<35µm) for faster clean-up to production ready
Measured GNP 10nm retention 95% (ultrapure water) for nano-scale contaminant control
Ultra-low extractables: NVR <20 mg/device, metals <5 µg/device
10/20/30/50nm & 0.1µm ratings, 222 Flat Cartridge, samples ready

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Micron rating: 10 nm / 20 nm / 30 nm / 50 nm / 0.1 µm
Max operating temperature: 70 °C
Effective filtration area: Ø68 mm: 1.2 m²/10"
Nominal lengths: 4" / 10" / 20"

Applications

SPM / 70% HNO3 / mixed-acid etchant oxidizing processes

SC1 / SC2 / TMAH / 29% NH4OH cleaning & alkaline

35% HCl / PAN acidic processes

Phosphoric-acid high-temperature filtration

NBA and other high-chemical-resistance chemicals

Chemical supply, point-of-use and reclaim pre-filtration

Specifications

Filter media / membrane: Naturally hydrophobic PTFE microporous membrane with a uniform pore distribution that neither swells nor sheds in organic solvents and aggressive chemistries
Support & drainage layers: Polypropylene support & drainage layers
Cage, core & end caps: Polypropylene cage, core and end caps
Seals / O-rings: EPDM or TEV (modified EPDM) O-rings, 222 style
Micron rating: 10 nm / 20 nm / 30 nm / 50 nm / 0.1 µm
Effective filtration area: Ø68 mm: 1.2 m²/10"; Ø83 mm: 1.8 / 2.2 / 2.8 m²/10"
Nominal outer diameter: Ø68 mm / Ø83 mm
Nominal lengths: 4" / 10" / 20"
End cap / connection: 222 flat, single open end
Max operating temperature: 70 °C
Max forward differential pressure: 0.4 MPa (58 psi) @ 25 °C; 0.2 MPa (29 psi) @ 70 °C
Max reverse differential pressure: 0.3 MPa (43 psi) @ 25 °C
Wetting & flushing: A hydrophobic membrane will not wet spontaneously with water: for aqueous service choose the UPW pre-wet option or wet out per SOP, otherwise measured ΔP will sit far above the curve
Extractables & cleanliness: Metal cleanliness available at < 25 µg/device with an electronic grade also offered; extractables are low
Integrity test: 100% integrity tested before shipment
Packaging: Dry packed; UPW pre-wet packed

Code	Outer diameter	Membrane area (10")
SX	Ø68 mm	1.2 m²
MX	Ø83 mm	1.8 m²
MY	Ø83 mm	2.2 m²
MZ	Ø83 mm	2.8 m²

Note: actual compatibility and service life depend on chemical concentration, temperature, flow, differential pressure, upstream contamination load and housing design. Validate under your real process conditions.

Part Number BuilderJY-WE26

Example part number

-WE26

JY: JIUNYUAN Technology
WE26: Naturally hydrophobic PTFE membrane with PP hardware — no swelling or shedding in solvents and aggressive chemistries
68: Ø68 mm
R20: 20 nm
10: 10"
E5D: EPDM O-ring | grade 5 (< 25 µg/device) | dry

Selectable options by segment

Outer diameter

Code	Specification
68	Ø68 mm
83	Ø83 mm

Retention rating

Code	Specification
R10	10 nm
R20	20 nm
R30	30 nm
R50	50 nm
P10	0.1 µm

Length

Code	Specification
04	4"
10	10"
20	20"

O-ring material

Code	Specification
E	EPDM
V	TEV (modified EPDM)

Cleanliness grade

Code	Specification
5	< 25 µg/device

The catalogue lists a single grade, < 25 µg/device (code 5); ask sales for the electronic-grade code.

Packaging

Code	Specification
D	Dry packed
W	UPW pre-wet packed

A hydrophobic membrane does not wet out in water: choose W (UPW pre-wet) for aqueous service, otherwise measured ΔP will sit far above the flow curve.

Not every combination is a stock item; uncommon combinations are made to order. Confirm with JIUNYUAN sales before ordering.

Dimensions

Single open end, 222 flatDrawing shows one representative size; the table below gives the exact diameter and length of each code.

Diameter / nominal length	A	B	C
Ø68 mm　4"	131.5 ± 2 mm	117.0 ± 2 mm	115.0 ± 2 mm
Ø68 mm　10"	249.5 ± 2 mm	235.0 ± 2 mm	233.0 ± 2 mm
Ø68 mm　20"	488.5 ± 2 mm	474.0 ± 2 mm	472.0 ± 2 mm
Ø83 mm　4"	118.0 ± 2 mm	103.0 ± 2 mm	101.0 ± 2 mm
Ø83 mm　10"	238.0 ± 2 mm	223.0 ± 2 mm	221.0 ± 2 mm
Ø83 mm　20"	460.0 ± 2 mm	445.0 ± 2 mm	443.0 ± 2 mm

A = overall length; B = seal face to seal face; C = effective media length.

Flow vs. Differential Pressure

UPW at 25 °C, single Ø83 mm 10" cartridge (2.8 m²), clean initial ΔP, membrane fully wetted out　Right axis shows the same values in psi.

For multiple cartridges, per-cartridge flow = total flow ÷ count. A 20" cartridge shows roughly half the ΔP of a 10".

View data table

GPM / LPM	20 nm	30 nm	50 nm	0.1 µm
2.00 / 7.57	8.11	7.16	4.48	2.41
4.00 / 15.1	16.2	14.3	8.96	4.82
6.00 / 22.7	24.3	21.5	13.4	7.23
8.00 / 30.3	32.4	28.6	17.9	9.64
10.0 / 37.9	40.6	35.8	22.4	12.1

Chemical Compatibility

Chemical	PTFE	EPDM	FKM / Viton
— 酸 —
Glacial acetic acid	R	R	NR
Hydrochloric acid, conc.	R	NR	NR
Hydrochloric acid, 6N	R	NR	R
Nitric acid, conc.	R	NR	R
Nitric acid, 6N	R	NR	R
Phosphoric acid, conc.	R	R	R
Sulfuric acid, conc.	R	NR	R
Hydrofluoric acid, 6N	R	NR	—
— 鹼 —
Ammonium hydroxide, 1N	R	R	R
Ammonium hydroxide, 3N	R	LR	LR
Potassium hydroxide, 3N	R	R	R
Sodium hydroxide, 3N	R	R	R
Sodium hydroxide, 6N	R	R	R
— 醇類 —
Amyl alcohol	R	R	R
Benzyl alcohol	R	R	R
Butanol	R	R	LR
Isopropyl alcohol (IPA)	R	R	R
Methanol	R	R	NR
— 酮類 —
Acetone	R	R	NR
Cyclohexanone	R	NR	NR
Methyl ethyl ketone (MEK)	R	R	NR
Methyl isobutyl ketone (MIBK)	R	R	NR
— 油類 —
Cottonseed oil	R	R	R
Lubricating oil	R	R	R
Peanut oil	R	R	R
Sesame oil	R	R	R
— 芳香烴 —
Benzene	R	NR	R
Toluene	R	NR	R
Xylene	R	NR	R
— 鹵代烴 —
Carbon tetrachloride	R	NR	R
Chloroform	R	NR	R
Ethylene dichloride	R	NR	LR
Freon TF	R	NR	R
Freon TMC	R	NR	LR
Dichloromethane	R	NR	LR
Perchloroethylene	R	NR	R
Trichloroethylene	R	NR	R
— 二醇類 —
Ethylene glycol	R	R	R
Glycerol	R	R	R
Propylene glycol	R	R	R
— 醚類 —
Diethyl ether	R	NR	NR
Isopropyl ether	R	NR	NR
Dioxane	R	NR	NR
Tetrahydrofuran (THF)	R	NR	NR
— 酯類 —
Amyl acetate	R	R	NR
Butyl acetate	R	R	R
Cellosolve acetate	R	R	NR
Ethyl acetate	R	R	R
Methyl acetate	R	R	R
Isopropyl acetate	R	R	NR
— 其他 —
Aniline	R	R	R
Dimethylformamide (DMF)	R	R	NR
Formaldehyde, 37%	R	R	NR
Gasoline	LR	R	R
Hexane (anhydrous)	LR	NR	R
Kerosene	R	NR	R
Phenol	R	NR	R
Pyridine	R	R	NR
Water	R	R	R
Acetonitrile	R	R	NR

R = resistant
LR = limited resistance, validate on site
NR = not resistant
— = no data

Ratings are general material-level guidance, not guarantees. Actual concentration, temperature, exposure time and mechanical stress all affect the outcome — validate with samples under your real process conditions before adoption.

Details

Where it fits

Why does a semiconductor process need a PTFE membrane filter?In highly corrosive processes such as SPM, SC1, SC2, TMAH, HCl, HNO3, phosphoric acid, PAN and mixed-acid etchants, the cartridge must not only withstand the chemical itself but also balance nano-scale contaminant retention, low metal extractables, low organic extractables, ΔP and rinse time.

The semiconductor-grade PTFE membrane filter uses a highly uniform membrane micro-pore network to deliver stable nano-scale retention and more predictable flow-channel behavior, making it well suited to wet-process chemical filtration that demands high purity, high chemical resistance and fast production-ready adoption.

Key characteristics

Core product features.Unlike conventional fiber depth media, this product is built around advanced fluoropolymer membrane micro-structure engineering, creating a more uniform, more connected and more controllable nano-pore network.

Semiconductor-grade PTFE membrane filter SEM micro-structure image — SEM image of the PTFE membrane micro-structure — a highly connected nano-pore network

Industry-unique membrane-type PTFE filter

Combining PTFE media with a membrane-type micro-pore structure delivers both compatibility with strong acids, strong bases and highly corrosive process chemicals, and the stable high-precision retention of membrane media.

Rare ultra-thin PTFE membrane micro-structure

A thinner, more precise PTFE membrane micro-structure (<35µm) helps reduce rinse burden and early release risk, so the cartridge cleans up to production ready faster and shortens qualification, line-change and ramp-up wait time.

Very high porosity and pore uniformity

The high-porosity design provides more effective flow channels that balance nano-scale retention with usable flow and ease the high-ΔP pain point of high-precision filters; a uniform, continuous micro-pore network lowers local velocity variation, bypass and premature clogging risk for more stable, predictable performance.

✓

Measured data: gold nanoparticle GNP 10nm retention = 95% (ultrapure water); ultra-low NVR <20 mg/device, ultra-low metals <5 µg/device.

Choosing between options

Proprietary fluoropolymer membrane micro-structure control platform

How it differs from a standard PTFE pleated filter.

Aspect	Standard PTFE pleated filter	Semiconductor-grade PTFE membrane filter
Positioning	General gas, liquid or highly corrosive use	Semiconductor corrosive wet process and high-purity chemical filtration
Technical narrative	Emphasizes PTFE chemical compatibility and hydrophobicity	Emphasizes fluoropolymer membrane micro-structure, nano-pore uniformity and low extractables
Rating	Commonly 0.1µm and above, gas sterilization	10nm, 20nm, 30nm, 50nm, 0.1µm and other options
Adoption metrics	Purchase by spec and compatibility	Retention, ΔP, NVR, metals and production-ready time together
Applications	General industry, gas, biotech or corrosive liquids	SPM, SC1, SC2, TMAH, HCl, HNO3, PAN, mixed-acid etchants

FAQ

How does this differ from a standard PTFE pleated filter?

Standard PTFE pleated filters tend to emphasize chemical resistance, hydrophobicity or gas filtration. This semiconductor-grade PTFE membrane filter focuses on 10/20/30/50nm and 0.1µm ratings, with membrane micro-pore structure, pore uniformity, low NVR, low metal extractables and fast production-ready clean-up.

Can it be used with SPM, SC1, SC2 or TMAH?

It can be evaluated for various acid/base and semiconductor wet processes including SPM, SC1, SC2, TMAH, 29% NH4OH, 35% HCl, 70% HNO3, phosphoric acid, PAN and mixed-acid etchants. Sample validation under your actual concentration, temperature, flow and ΔP is still recommended.

Are 10nm or 20nm samples available?

Samples are ready. Ask about 10nm, 20nm, 30nm, 50nm, 0.1µm and other ratings; we can arrange sample testing and specification confirmation to suit your process.

What does Bubble Point >400 kPa mean?

Bubble Point is one reference indicator of membrane integrity and pore-size correlation. The actual verification method should follow the cartridge spec, wetting liquid, test method and your internal standard.

What should I choose if I need low ΔP or high flow?

The 68mm type references 0.5 kg/cm² @ 1 LPM. For a low-ΔP (high-flow) option, share your target flow, ΔP limit, cartridge length and housing spec and we will recommend a suitable option.

Can the O-ring be FFKM or EPDM?

FFKM, EPDM, TEV and other O-ring options are available. Choose the material based on your chemical, temperature and process compatibility.

How do I start testing?

Email service@jyfiltec.com with your chemical, operating temperature, flow, differential pressure, current cartridge spec and target contaminant. We will help confirm samples, specification and an initial test direction.

Semiconductor-grade PTFE Membrane Filter Cartridge

Outer diameter

Retention rating

Length

O-ring material

Cleanliness grade

Packaging

Where it fits

Key characteristics

Industry-unique membrane-type PTFE filter

Rare ultra-thin PTFE membrane micro-structure

Very high porosity and pore uniformity

Choosing between options

Proprietary fluoropolymer membrane micro-structure control platform

Glass Fiber Pleated Filter

Hydrophilic PTFE Nano Filter

Hydrophilic PTFE Pleated Filter

Further Reading

PTFE Filter Selection Guide: Hydrophilic vs Hydrophobic

How Wrong Filter Selection Hurts Wafer Yield

Chemical Compatibility Guide for Filter Material Selection